M-Center in Neutron-Irradiated 4H-SiC

نویسندگان

چکیده

We report on the metastable defects introduced in n-type 4H-SiC material by epithermal and fast neutron irradiation. The irradiation are much less explored compared to electron or proton irradiation-induced defects. In addition carbon vacancy (Vc), silicon (Vsi) antisite-carbon (CAV) complex, has four deep-level defects, all arising from defect, M-center. were investigated deep level transient spectroscopy (DLTS), high-resolution Laplace DLTS (L-DLTS) isothermal DLTS. existence of fourth M4, recently observed ion-implanted 4H-SiC, been additionally confirmed neutron-irradiated samples. technique proven as a useful tool for studying

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ژورنال

عنوان ژورنال: Crystals

سال: 2021

ISSN: ['2073-4352']

DOI: https://doi.org/10.3390/cryst11111404